Fluoromethane
Chemical compound / From Wikipedia, the free encyclopedia
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Fluoromethane, also known as methyl fluoride, Freon 41, Halocarbon-41 and HFC-41, is a non-toxic, liquefiable, and flammable gas at standard temperature and pressure. It is made of carbon, hydrogen, and fluorine. The name stems from the fact that it is methane (CH4) with a fluorine atom substituted for one of the hydrogen atoms. It is used in semiconductor manufacturing processes as an etching gas in plasma etch reactors.[2]
Quick Facts Names, Identifiers ...
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Names | |||
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IUPAC name
Fluoromethane | |||
Other names
Freon 41 Methyl fluoride | |||
Identifiers | |||
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3D model (JSmol) |
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Abbreviations | R41 | ||
1730725 | |||
ChEBI | |||
ChEMBL | |||
ChemSpider |
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ECHA InfoCard | 100.008.907 | ||
EC Number |
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391 | |||
KEGG |
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MeSH | Fluoromethane | ||
PubChem CID |
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UNII | |||
UN number | UN 2454 | ||
CompTox Dashboard (EPA) |
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Properties | |||
CH3F | |||
Molar mass | 34.03 g/mol | ||
Appearance | Colourless gas | ||
Odor | pleasant, ether-like odour at high concentrations | ||
Density | 1.4397 g/L 0.557 g/cm3 (liquid) at saturation pressure at 25 °C | ||
Melting point | −137.8 °C (−216.0 °F; 135.3 K)[1] | ||
Boiling point | −78.4 °C (−109.1 °F; 194.8 K)[1] | ||
1.66 L/kg (2.295 g/L) | |||
Vapor pressure | 3.3 MPa | ||
Hazards | |||
GHS labelling: | |||
Danger | |||
H220, H280 | |||
P210, P377, P381, P403, P410+P403 | |||
NFPA 704 (fire diamond) | |||
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
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