Chlorosilane
Chemical compounds containing at least one silicon-chlorine bond / From Wikipedia, the free encyclopedia
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Further information: Trichlorosilane
In inorganic chemistry, chlorosilanes are a group of reactive, chlorine-containing chemical compounds, related to silane (SiH4) and used in many chemical processes. Each such chemical has at least one silicon-chlorine (Si−Cl) bond. Trichlorosilane is produced on the largest scale. The parent chlorosilane is silicon tetrachloride (SiCl4).[1]